Principles and Technology for Designing Precision Machines by L. Hale [Thesis]

By L. Hale [Thesis]

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Independent scientific review groups concluded that ignition and energy gain should be demonstrated first before developing a power-plant driver. They also concluded that the glass laser is the only driver capable of achieving ignition and energy gain within the next decade. The experiments conducted on the NIF over the next three decades will greatly expand scientific knowledge in the areas of nuclear fusion, plasma physics with applications to Astrophysics, densematter physics and Hydrodynamics (the study of fluid motion and fluid instabilities).

The preferred approach for preserving figure is to support the optic during fabrication metrology in the same optic mount and orientation as used in the projection optics system. Then the optic mounts need only provide repeatable support rather than gravity-compensating support. The initial mechanical alignment of optic surfaces is accomplished on a CMM (coordinate measuring machine) to an accuracy of 10 to 20 microns. The final optical alignment requires a special PSDI to inspect the wavefront and distortion errors of light passing through the projection optics system.

Michelson in 1881 for which he received the Nobel prize in 1907. The interferometer is the instrument that transfers the international standard of length into physical measurements. Today, interferometers are essential in ultraprecision lithography machines that now support a multibillion-dollar integrated circuits industry. Precision Engineering is the foundation of all modern Japanese Manufacturing. H. Takeyama, President Kanagawa Institute of Technology, May 1993 Precision machinery will play an even greater role in the future, which presents a tremendous challenge for builders and users alike to develop the expertise required to excel in a world-wide marketplace.

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