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654. [13] U. Helmersson, S. Todorova, S. A. -E. Sundgren, L. C. Markert and J. E. Greene: J. Appl. Phys. Vols. 62 (1987), pp. 481. [14] M. Larsson, P. Hollman, P. Hedenqvist, S. Hogmark, U. Wahlstro¨m and L. Hultman: Surf. Coat. Technol. Vols 86-87 (1996), pp. 351. [15] K. M. Hubbard, T. R. Jervis, P. B. Mirkarimi and S. C. Barnett: J. Appl. Phys. Vols. 72 (1992), pp. 4466. B. Mirkarimi, L. Hultman and S. A. Barnett: Appl. Phys. Lett. Vols 57, (1990), pp. 2654. B. Mirkarimi, S. A. Barnett, K. M.
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In Fig. 6, the H/E values exhibited a similar tendency with hardness. 087. From the results of hardness and H/E, it can be suggested that the Ti–Si–B–C–N coating with Si target power up to 150W could provide a better wear-resistance with higher fracture toughness than that of Ti–Si–B–C–N coating with Si target power above 200W. Materials Science Foundations Vols. 7 Wear rate [x10 mm /(Nm)] Fig. 7(a) shows the friction coefficients of the Ti–Si–B–C–N coating against a WC-Co ball as a function of Si target power.