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ICF Handbook 2005 31 QTYUIOP DESIGN FOR NIF CRYOGENIC TARGET SYSTEM (GA, SCHAFER, LLNL, LANL, UR/LLE) D2 TEST SYSTEM FILLING AND LAYERING EQUIPMENT (GA, LLNL) For more information please contact: Dr. 3 μm/h – 2 μm/h Surface finish: Typical Rq ~<1000Å Rq as low as ~10Å (rate dependent) • • • Coating area: ~>2 cm diam Foot print: 32 x 84 in. 110VAC or 220VAC operation System Includes: • • • • • • RF plasma unit and power supply Coating chamber (~0 5 in. diam) Gas and pressure control units Agitation system (for non-flat targets) Timer for extended operation Installation and training Description: The GDP coating systems built at GA have been used for ICF target fabrication for nearly 10 years.
We have programmed a Nikon NexIV automated microscope for batch characterization applications. It is most commonly used to measure ~20 shells from one of our shell production runs to give the average and standard deviation of diameter, out-of-round, and nonconcentricity for that batch. Spheremapping. We have developed a mapper for full surface characterization of spheres. They are mounted on a vacuum chuck that rotates sufficiently smoothly to make height profiles with an accuracy ~1 nm. We have developed jigs that allow such measurements up to ~15 deg from the equator.