By Yale Strausser
This ebook experiences thoughts in which silicon processing engineers operating with semiconductors can meet the calls for for superior fabric caliber and function made beneficial by means of more and more stringent requisites, corresponding to reducing barrier movie thicknesses. one of the innovations defined are tracking the effectiveness of floor cleansing techniques; deciding on the quantity of silicon intake in the course of barrier movie and silicide development; and silicon selective epitaxial progress.
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Appl Phys. 40, 3702, 1969. 51 C. I. Drowley. Proceedings. 10th Internationall Conf. on Chem. Vapor Deposition. Electrochemical Society, Pennington, NJ, 1987, p. 418. 52 C. Galewski and W. G. Oldham. Tech. Digest 1988 Symp. VLSI Technology, p. 79. 53 L. Jastrzebki, J. F. Corboy, J. T. McGinn, and R. Pagliaro. /. Electrochem. Soc. 130, 1571, 1983. 54 R. , J. F. Corboy, L. Jastrzebski, and R. Soydan. /. Electrochem. Soc. 134, 1235, 1987. 55 T. Y. Hsieh, K. H. Jung, D. L. Kwong, and S. K. Lee. / Electrochem.
Ravi. Imperfections and Impurities in Semiconductor Silicon. J. Wiley and Sons, New York, 1981, Chapts. 4 and 5. 27 B. O. Kolbesen and H. P. Strunk. In VLSI Electronics: Microstructure Science. Vol. 12. (N. G. Einspruch and H. ) Academic Press, New York, 1985, Chapt. 4. 28 M. P. Scott, L. Caubin, D. C. Chen, E. R. Weber, J. Rose, and T. Tucker. Mat. Res. Soc. Symp. Proc. 36, 37, 1985. 29 F. Hottier and R. Cadoret. /. Crystal Growth. 61, 245, 1983. so Y. Kobayashi, Y. Shinoda, and K. Sugii. Jpn.
Johnson and P. T Panousis. IEEE Trans. Electron Devices. 18, 965, 1971. " Annual Book of ASTM Standards. F 76-88. American Society for Testing and Materials, Philadelphia, 1988. so R. Baron, G. Shifrin, O. J. Marsh, and J. W. Mayer. / Appl Phys. 40, 3702, 1969. 51 C. I. Drowley. Proceedings. 10th Internationall Conf. on Chem. Vapor Deposition. Electrochemical Society, Pennington, NJ, 1987, p. 418. 52 C. Galewski and W. G. Oldham. Tech. Digest 1988 Symp. VLSI Technology, p. 79. 53 L. Jastrzebki, J.